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GEN10 MBE System

Automated Wafer Transfer Enables High System Utilization


The GEN10â„¢ MBE System is the most economical, flexible cluster tool system in a proven platform, allowing for up to three configurable, material-specific growth modules. This enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations. This, combined with ¹¤¿ÚÉ«ÇéƬ components technology, are key factors in why the MBE community is choosing the GEN10â„¢ MBE System, no matter what the application.

  • Automated wafer transfer enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations
  • Economical upgrade path to additional growth modules, maximum of three
  • Configurable, material-specific growth modules in a cluster architecture enable growth of incompatible materials in one vacuum system
  • Direct process path to larger production MBE systems

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