The GEN10â„¢ MBE System is the most economical, flexible cluster tool system in a proven platform, allowing for up to three configurable, material-specific growth modules. This enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations. This, combined with ¹¤¿ÚÉ«ÇéƬ components technology, are key factors in why the MBE community is choosing the GEN10â„¢ MBE System, no matter what the application.
- Automated wafer transfer enables high system utilization, allowing multiple researchers to use the system at the same time and perform unattended growths and calibrations
- Economical upgrade path to additional growth modules, maximum of three
- Configurable, material-specific growth modules in a cluster architecture enable growth of incompatible materials in one vacuum system
- Direct process path to larger production MBE systems