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Gas & Vapor Delivery Systems

Advanced semiconductor devices developed for the most advanced computing processes, such as AI and edge computing, need the ultra-high-purity environments of our gas and vapor deposition delivery systems.

Gas & Vapor Delivery Systems

Advanced semiconductor devices developed for the most advanced computing processes, such as AI and edge computing, need the ultra-high-purity environments of our gas and vapor deposition delivery systems.

Reduce production costs by purchasing lower-cost, higher-concentration gases with the Apex Gas Mixing System.
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Get an improved gas mixture concentration with the Precision Gas Mixing System. It generates gas mixtures for tighter process…
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As the industry standard for reproducible vapor delivery control of chemical precursor vapors and dopant gases in CVD and…
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